Spectroscopic Ellipsometry | REAL – 2027 |

SE is an technique; it does not measure thickness directly. Instead, researchers use the measured Δcap delta

(Psi): The ratio of the amplitude change between two light components (parallel and perpendicular to the plane of incidence). Δcap delta (Delta): The phase difference between these two components. Spectroscopic Ellipsometry

Because it measures a rather than absolute intensity, SE is highly resistant to light source fluctuations and does not typically require a reference sample, making it exceptionally accurate. How It Works: The Experimental Setup SE is an technique; it does not measure thickness directly